Ultra-precision grinding of monocrystalline silicon cylindrical mirror
نویسندگان
چکیده
Abstract As one of the important functional components in optical diagnosis system, processing accuracy monocrystalline silicon cylindrical mirror directly affects overall performance entire experimental device. In order to obtain high-precision elements, coordinate transfer function models diamond wheel surface parallel grinding process were established, and forming scheme was proposed based on dressing precision element precision. At end, experiment for a with size 440mm × 50mm carried out. The PV value form error after about 2.7μm, which proved correctness element.
منابع مشابه
The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon
This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth. INTRODUCT...
متن کاملIn-process force monitoring for precision grinding semiconductor silicon wafers
Forces generated during precision wafer grinding are small and present challenges for accurate and reliable process monitoring. In this work, these challenges are met by incorporating noncontact displacement sensors into an aerostatic spindle that is calibrated to measure grinding forces from the relative motion between the spindle rotor and stator. This arrangement allows the calculation of gr...
متن کاملSynthetically Modeling of Thermal Error and Grinding Force Induced Error on a Precision NC Cylindrical Grinding Machine
Thermal errors and force-induced errors are two most significant sources of the NC grinding machine inaccuracy. And error compensation technique is an effective way to improve the manufacturing accuracy of the NC machine tools. Effective compensation relies on an accurate error model that can predict the errors exactly during machining. In this paper, a PSO–BP neural network modeling technique ...
متن کاملMonocrystalline silicon carbide nanoelectromechanical systems
SiC is an extremely promising material for nanoelectromechanical systems given its large Young’s modulus and robust surface properties. We have patterned nanometer scale electromechanical resonators from single-crystal 3C-SiC layers grown epitaxially upon Si substrates. A surface nanomachining process is described that involves electron beam lithography followed by dry anisotropic and selective...
متن کاملA Comparison of Force and Acoustic Emission Sensors in Monitoring Precision Cylindrical Grinding
Abstract Aerostatic spindles are used in precision grinding applications requiring high stiffness and very low error motions (5 to 25 nm). Forces generated during precision grinding are small and present challenges for accurate and reliable process monitoring. These challenges are met by incorporating non-contact displacement sensors into an aerostatic spindle that are calibrated to measure gri...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of physics
سال: 2023
ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']
DOI: https://doi.org/10.1088/1742-6596/2591/1/012005